Inspection Systems

MX2000IR Automatic Wafer Inspection with Handling Unit

The Viscom inspection system MX2000IR takes on 100 % inspection of all safety-critical components, with the wafers automatically loaded and unloaded by a handling unit.

Highlights

Infrared illumination – both transmitted and reflected light
Infrared light sources have a very long life span, are scalable, have high performance capabilities and guarantee exceptionally high resolution
High throughput
Non-destructive testing (NDT) on and in the wafer
Automatic wafer identification reading and pre-alignment are done parallel to the inspection
Direct identification of each wafer by code reading (barcode, data matrix code, OCR)
Offline programming station available in many languages
Automatic loading and unloading make the system ideal for medium to large lot sizes. For 150 and 200 mm wafers, up to four cassetes holding a maximum 25 wafers each can be automatically loaded. For 300 mm wafers, four FOUP stations (Front Opening Unified Pod) are available

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