Pheripheral Equipment
Wafer Mounting System
ADT Wafer Mounting Systems enable mounting of wafers/substrates to frames using various kinds of tapes.
The systems are offered in two basic configurations:
- WM-966 – up to 8″ wafer
- WM-966LA – up to 12″ wafer.
System Highlights:
- Uniform mounting without air bubbles
- Build-in reeling and removal of UV tape backing
Wafer Cleaning Systems
Efficient compact cleaning units to support your process
ADT 977 Wafer Cleaner Systems are designed for cleaning workpieces after dicing.
The systems are offered in two basic configurations:
- WCS-977 – round wafer up to 8″
- WCS-977LA – round wafer up to 12″
System Highlights:
- Atomizing cleaning
- Process monitoring
- Compact design
- Robust, vibration free
- Environmentally friendly
- Options:
- Build-in mist exhaust unit
- CO2 injection
- Customized chucks
- Cleaning additives





