Plasma Cleaning

Vision Semicon offers Plasma Cleaning Systems from R&D
to full in-line systems:

-    Multi Direct Plasma Cleaning
-    JEDEC Tray Handling Direct Plasma Cleaning
-    Batch Plasma Cleaning System
-    Curing Oven

VSP-88L Table Top Plasma Cleaner

The VSP-88L compact design makes this unit very suitable for R&D applications. It is suitable for up to 12 inch wafers and various substrates.

Product Application:

- Organic Residue Removal - Improve and Enhance Adhesion
- Surface Activation - Contamination Removal

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